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IEC 62047-30:2017 Part 30: electro-mechanical conversion characteristics of MEMS

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发表于 2017-8-18 12:13:48 | 显示全部楼层 |阅读模式
IEC 62047-30:2017 Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

IEC 62047-30:2017 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

Publication type        International Standard
Publication date        2017-07-14
Edition        1.0
Available language(s)        English
TC/SC        TC 47/SC 47F - Micro-electromechanical systemsrss
ICS        31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Stability date          2022
Pages        21
File size        1212 KB

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