IEC 62047-30:2017 Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
IEC 62047-30:2017 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.
Publication type International Standard
Publication date 2017-07-14
Edition 1.0
Available language(s) English
TC/SC TC 47/SC 47F - Micro-electromechanical systemsrss
ICS 31.080.99 - Other semiconductor devices
31.140 - Piezoelectric devices
Stability date 2022
Pages 21
File size 1212 KB